The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2005
Filed:
Aug. 01, 2003
Ulrich Kaczynski, Bad Nauheim, DE;
Ulrich Kaczynski, Bad Nauheim, DE;
Leica Microsystems Semiconductor GmbH, Wetzlar, DE;
Abstract
An XY coordinate measuring stage includes a drive unit for a coordinate axis. The drive unit has a friction rod and a motor, the motor including a motor shaft in contact with a side of the friction rod. An applied pressure roller contacts an opposite side of the friction rod. At least one applied pressure spring urges the applied pressure roller, the friction rod, and the motor shaft against one another with an applied pressure force so that the motor shaft frictionally engages the friction rod, converting a rotational motion of the motor into a linear motion of the friction rod. A compensation device associated with the motor shaft generates a compensation force onto the motor shaft oppositely to the applied pressure force so as to at least partially compensate for the applied pressure force.