The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2005
Filed:
Oct. 31, 2003
Sean Lian, Allentown, PA (US);
Vivian Ryan, Hampton, NJ (US);
Debra Louise Yencho, Allentown, PA (US);
Sean Lian, Allentown, PA (US);
Vivian Ryan, Hampton, NJ (US);
Debra Louise Yencho, Allentown, PA (US);
Agere Systems, Inc., Allentown, PA (US);
Abstract
Techniques for detecting damage on an integrated circuit die using a particle suspension solution are disclosed. The particles of the suspension solution preferentially attach to damaged regions on exposed dielectric films or other portions of the die. For example, one aspect of the invention is a method of detecting damage to a dielectric film used in fabricating a die of an integrated circuit. A particle suspension solution is applied to the die and damaged regions of the dielectric film are identified as areas having an accumulation of particles of the particle suspension solution.