The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2005
Filed:
Feb. 10, 2003
Kevin P. Fairbairn, Santa Clara County, CA (US);
Terry Bluck, Santa Clara County, CA (US);
Craig Marion, Alameda County, CA (US);
Robert E. Weiss, San Francisco County, CA (US);
Kevin P. Fairbairn, Santa Clara County, CA (US);
Terry Bluck, Santa Clara County, CA (US);
Craig Marion, Alameda County, CA (US);
Robert E. Weiss, San Francisco County, CA (US);
Intevac, Inc., Santa Clara, CA (US);
Abstract
There is described a disk processing and manufacturing equipment in which the processing chambers are stacked on top of each other and in which the disks move through the system on disk carriers which are adjustable to take disks of varying sizes. The disks enter the system through a load zone and are then installed into disk carriers. They move in the carriers sequentially through processing chambers at one level and then move to the other level in a lift or elevator. At this other level, the disks again move sequentially through the system on that level and then exit at an unload zone.