The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2005
Filed:
May. 30, 2000
Brian J. Brown, Palo Alto, CA (US);
Michael Sugarman, San Francisco, CA (US);
Makoto Inagawa, Palo Alto, CA (US);
Daniel D. Ramar, Santa Cruz, CA (US);
Alexander Lerner, San Jose, CA (US);
Brian J. Brown, Palo Alto, CA (US);
Michael Sugarman, San Francisco, CA (US);
Makoto Inagawa, Palo Alto, CA (US);
Daniel D. Ramar, Santa Cruz, CA (US);
Alexander Lerner, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A roller assembly is provided. The roller assembly comprises a groove that the includes two opposing surfaces. The roller assembly comprises either frictional surfaces positioned along the groove, or O-ring(s) coupled to the groove. The frictional surfaces may be a plurality of holes at spaced intervals along the opposing surfaces of the groove, a plurality of holes, each hole sized so as to extend into the two opposing surfaces, at spaced intervals along the opposing surfaces of the groove, or may be a bead-blasted surface or a knurled surface positioned along the opposing surfaces of the groove.