The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2005
Filed:
Jun. 12, 2002
Martin Gutsche, Dorfen, DE;
Bernhard Sell, Dresden, DE;
Annette Sänger, Dresden, DE;
Harald Seidl, Feldkirchen, DE;
Martin Gutsche, Dorfen, DE;
Bernhard Sell, Dresden, DE;
Annette Sänger, Dresden, DE;
Harald Seidl, Feldkirchen, DE;
Infineon Technologies AG, Munich, DE;
Abstract
An upper capacitor electrode of a trench capacitor of a DRAM memory cell is formed at least in part as a result of a plurality of metal-containing layers being deposited one on top of another and in each case being conditioned after they have been deposited. In this way, the internal stress of the electrode layer can be reduced, and therefore a breaking strength and a resistance to leakage currents of the trench capacitor can be increased.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile