The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2005
Filed:
Aug. 08, 2004
Applicants:
Hung-chi Wang, Taipei, TW;
Mou-sirn Chen, Ping-Tung Hsien, TW;
Chung-ming Kuo, Tai-Nan, TW;
Inventors:
Assignee:
Powerchip Semiconductor Corp., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B007/02 ;
U.S. Cl.
CPC ...
Abstract
The present invention provides a support stand. The support stand includes at least one H-beam set between a light source of an exposure machine and an operating machine of that to support an optical axis of the exposure machine, at least one supporting element set on a first part of the H-beam, a signal emitter set on a second part of the H-beam, and a signal receiver, receiving a signal sent from the signal emitter, set on a third part of the H-beam. The signal emitter and the signal receiver are used for detecting an optical axis shift.