The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2005
Filed:
Dec. 11, 2002
Yasuyoshi Kitazawa, Toyohashi, JP;
Shigeto Suzuki, Tokyo, JP;
Toshio Miki, Ise, JP;
Susumu Nakagawa, Ise, JP;
Katsumi Yasuda, Ise, JP;
Kazunari Kitaji, Ise, JP;
Yasuyoshi Kitazawa, Toyohashi, JP;
Shigeto Suzuki, Tokyo, JP;
Toshio Miki, Ise, JP;
Susumu Nakagawa, Ise, JP;
Katsumi Yasuda, Ise, JP;
Kazunari Kitaji, Ise, JP;
Shinko Electric Co., Ltd., Tokyo, JP;
Abstract
The wafer mapping system has an access port for transferring a wafer in and out and detects an accommodated wafer for a cassette in which slots for accommodating and holding inserted wafers are disposed in tiers. The wafer mapping system includes (1) a receiver that is fixed to a member facing the access port for receiving elements arranged serially along a height direction of the cassette, and (2) a transmitter that is disposed movable in an up and down direction of the cassette and transmits a signal toward a wafer accommodated in each of the slots of the cassette. The receiver receives a signal from the transmitter, and thereby the presence or absence of a wafer and a state of a wafer accommodated in each of the slots of the cassette are detected. Thereby, with a simple system configuration, an accommodation state of the wafer can be accurately detected.