The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2005
Filed:
Oct. 16, 2002
Tokuhide Nawata, Kasugai, JP;
Yoshihisa Sudoh, Kasugai, JP;
Masayuki Kouketsu, Kasugai, JP;
Masayuki Watanabe, Kasugai, JP;
Hiroki Doi, Kasugai, JP;
Tokuhide Nawata, Kasugai, JP;
Yoshihisa Sudoh, Kasugai, JP;
Masayuki Kouketsu, Kasugai, JP;
Masayuki Watanabe, Kasugai, JP;
Hiroki Doi, Kasugai, JP;
CKD Corporation, Aichi, JP;
Abstract
A flow controller and a flow controlling method are adapted to be released from conventional restrictions by using a novel type called a pulse shot type. A pulse shot (opening/closing operation of a first cutoff valve () and, after that, opening/closing operation of a second cutoff valve ()) is repeated. Simultaneously, a volume flow Q of process gas exhausted from the second cutoff valve () per unit time on the basis of after-filling pressure and after-exhaust pressure of the process gas in a gas filling capacity () measure by a pressure sensor (). Furthermore, a mode of the pulse shot is changed to control the volume flow Q of the process gas exhausted from the second cutoff valve () per unit time.