The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2005
Filed:
Dec. 19, 2003
Haruzo Miyashita, Fujiyoshida, JP;
Haruzo Miyashita, Fujiyoshida, JP;
Anelva Corporation, Fuchu, JP;
Abstract
A pressure sensor includes a capacitive pressure sensor chip mounted with the intervention of a sealing member on a base adaptor so as to be detachable. The sensor chip being constructed in a manner that a second substrate with a diaphragm electrode is placed between a first substrate with a fixed electrode and a third substrate with a pressure inlet and is bonded to the first and the third substrate so as to overlap the fixed electrode, the diaphragm electrode and the pressure inlet with a prescribed gap between the fixed electrode and the diaphragm electrode. Moreover, the third substrate is larger than the second substrate to make place which extends outside the second substrate and plays a role as a sealing surface to be in contact with the sealing member, and the sealing surface is pressed to the base adaptor with the intervention of the sealing member.