The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2005
Filed:
Sep. 30, 2002
Gary Jones, Austin, TX (US);
Christopher A. Bode, Austin, TX (US);
Richard D. Edwards, Austin, TX (US);
Matthew A. Purdy, Austin, TX (US);
Gary Jones, Austin, TX (US);
Christopher A. Bode, Austin, TX (US);
Richard D. Edwards, Austin, TX (US);
Matthew A. Purdy, Austin, TX (US);
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
A method and an apparatus for selectively applying correction to a process control. Manufacturing data relating to the processing of a workpiece is acquired. The manufacturing data includes metrology data relating to the processed workpiece. An adjustment for at least a first or a second control input parameter is determined based upon the manufacturing data. The first and second control input parameters are organized to isolate the first control input parameter from the second control input parameter for adjusting at least one of the first and the second control input parameters, using a controller.