The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2005
Filed:
Jan. 18, 2002
Applicants:
Nobuo Ishii, Amagasaki, JP;
Makoto Ando, Kawasaki-shi, Kanagawa, JP;
Inventors:
Nobuo Ishii, Amagasaki, JP;
Makoto Ando, Kawasaki-shi, Kanagawa, JP;
Assignees:
Tokyo Electron Limited, Tokyo, JP;
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K010/00 ;
U.S. Cl.
CPC ...
Abstract
A desired component of an electromagnetic field in a slot antenna is selectively taken to be supplied into a vessel for generating a plasma. The angle of inclination of slots () relative to the circumferential direction of a radiation surface () of the slot antenna () is decreased as the position of the slots approaches the periphery of the radiation surfacefrom the center O of the radiation surface.