The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2005
Filed:
Jan. 17, 2003
Applicant:
Ofer Sneh, Broomfield, CO (US);
Inventor:
Ofer Sneh, Broomfield, CO (US);
Assignee:
Sundew Technologies, LLC, Broomfield, CO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C016/00 ; C23C016/455 ; C23F001/00 ; H01L021/306 ;
U.S. Cl.
CPC ...
Abstract
An apparatus and method for atomic layer deposition with improved efficiency of both chemical dose and purge is presented. The apparatus includes an integrated equipment and procedure for chamber maintenance.
Published as:
WO03062490A2; US2003180458A1; KR20040085153A; EP1466034A1; JP2005515647A; US6911092B2; CN1643179A; US2005160983A1; US7635502B2; US2010043888A1; CN1643179B; CN101818334A; KR100979575B1; US8012261B2; JP4908738B2; CN101818334B;