The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2005
Filed:
Mar. 22, 2002
Katsunori Ichiki, Kanagawa, JP;
Kazuo Yamauchi, Kanagawa, JP;
Hirokuni Hiyama, Kanagawa, JP;
Seiji Samukawa, Miyagi, JP;
Katsunori Ichiki, Kanagawa, JP;
Kazuo Yamauchi, Kanagawa, JP;
Hirokuni Hiyama, Kanagawa, JP;
Seiji Samukawa, Miyagi, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A plasma generator generates positive ions and negative ions in a plasma. An ion extracting portion () selectively extracts the generated positive ions and negative ions from the plasma, and accelerates the extracted ions in a predetermined direction. The positive ions and the negative ions are selectively applied to the workpiece (X). The plasma generator applies a high-frequency voltage to a process gas in a vacuum chamber for generating a plasma which is composed of positive ions and electrons from the process gas, and interrupts the high-frequency voltage for attaching the electrons to the residual process gas to generate negative ions. The application of the high-frequency voltage and the interruption of the high-frequency voltage are alternately repeated.