The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2005
Filed:
Dec. 14, 2000
Eiji Hirose, Yamanashi, JP;
Noriyuki Iwabuchi, Miyagi, JP;
Takeshi Yokouchi, Miyagi, JP;
Shingo Suzuki, Yamanashi, JP;
Eiji Hirose, Yamanashi, JP;
Noriyuki Iwabuchi, Miyagi, JP;
Takeshi Yokouchi, Miyagi, JP;
Shingo Suzuki, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
First and second pressure sensorsandthat perform pressure detection over different pressure detection ranges from each other detect the pressure within a process chamberof an etching device. A pressure controllerselects optimal pressure data in correspondence to the pressure inside the process chamber from the pressure data provided by the first and second pressure sensorsand. It also analyzes the selected pressure data at a resolution selected in correspondence to the pressure inside the process chamberand thus obtains pressure data achieving a predetermined data density. The pressure controllercontrols a pressure control valveso as to ensure that the pressure data match preset pressure data.