The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2005
Filed:
Jul. 12, 2001
Hisatoshi Fujiwara, Tokyo, JP;
Toru Yoshizawa, Tokyo, JP;
Yukitoshi Otani, Tokyo, JP;
Yamatake Corporation, Tokyo, JP;
Abstract
A grating () is disposed to face the measurement target surface of a measurement target object (). A light source () irradiates the grating () with illumination light. A camera () captures a moire fringe image formed on the grating () by light passing through the gratingand reflected by the measurement target surface. A moving means () changes the distance (H) between the gratingand the measurement target surface. An analyzing means () performs an analysis process of obtaining 3-D shape information of the measurement target surface from the image picked up by the camera () in at least two cases in which the distance (H) is set to different values, and obtains, on the basis of the 3-D shape information in each case and the distance H, true 3-D shape information from which the measurement error caused by the inclination of the measurement target surface is eliminated.