The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 14, 2005

Filed:

Jun. 06, 2003
Applicants:

Tetsuya Yoshida, Hitachi, JP;

Naoki Sasahara, Hitachi, JP;

Katsunori Tsuchiya, Hitachi, JP;

Akio Nakano, Hitachi, JP;

Inventors:

Tetsuya Yoshida, Hitachi, JP;

Naoki Sasahara, Hitachi, JP;

Katsunori Tsuchiya, Hitachi, JP;

Akio Nakano, Hitachi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F007/033 ; G03F007/40 ;
U.S. Cl.
CPC ...
Abstract

A permanent resist obtained by at least photoexposure and alkali development of a photosensitive resin composition, the permanent resist containing a metal carboxylate group, or a carboxyl group (a carboxyl anhydride group is also included among a carboxyl group according to the invention) and a metal carboxylate group, wherein an alkaline earth metal carboxylate group constitutes at least 30 mole percent of the total of a carboxyl group and a metal carboxylate group.


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