The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2005
Filed:
Sep. 06, 2001
Tomonao Kuwada, Tsukui-gun, JP;
Masatake Yoneda, Nirasaki, JP;
Takashi Nishimori, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
There is disclosed a shower head structure, disposed on a ceiling portion of a process chamber for subjecting a material to be treated to a film forming process, for supplying a predetermined gas, the structure comprising a head main body formed in a cup shape having a bottom with a plurality of gas injection holes opened therein, and formed integrally with a joining flange portion to be attached to the ceiling portion of the process chamber on an opening side of the cup shape, and a head heating portion, disposed on the bottom of the head main body, for adjusting the head main body at a desired temperature, so that the film forming process for enhancing reproducibility under a low temperature is performed and a reactive byproduct is removed under a high temperature.