The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2005
Filed:
May. 24, 2002
Applicants:
Luc Ouellet, Granby, CA;
Robert Antaki, St-Luc, CA;
Yves Tremblay, Brigham, CA;
Inventors:
Assignee:
DALSA Semiconductor Inc., Waterloo, CA;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C014/35 ; H01L021/00 ;
U.S. Cl.
CPC ...
Abstract
A cavity forming formed in an encapsulation structure under a vacuum in a vacuum chamber is sealed with a capping layer. A stiff protective layer under tensile stress is deposited on the capping layer prior to venting the vacuum chamber to atmospheric pressure. The capping layer is preferably aluminum or an aluminum alloy, and the protective layer is preferably δ-TiN having a suitable high Young's modulus.