The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 31, 2005

Filed:

Feb. 06, 2002
Applicant:

Alan L. Starner, Orange, CA (US);

Inventor:

Alan L. Starner, Orange, CA (US);

Assignee:

Aviza Technology, Inc., Scotts Valley, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F019/00 ;
U.S. Cl.
CPC ...
Abstract

An inertial temperature control system and method are provided for changing the temperature of a body between two temperatures such that the ending temperature is reached smoothly without substantial temperature overshoot or oscillation. A temperature control algorithm is fed a set point temperature that accelerates and decelerates at a physically attainable rate.


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