The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2005
Filed:
Mar. 05, 2004
Jess Koehler, Oberkochen, DE;
Jess Koehler, Oberkochen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
A zoom system that is particularly suited to use on an illumination device of a microlithographic projection exposure system and is configured in the form of a focal-length-zooming lens. The lenses of the zoom system define an object plane () and an image plane () that is a Fourier transform of the object plane. Both an intermediate pupillary plane () that is conjugate to the image plane and an intermediate field plane () that is a Fourier transform of the image plane lie between the object plane () and image plane (). At least one movable lens () is arranged in the vicinity of these intermediate image planes (). The system is characterized by a large expansion of the illuminated area on the image plane for short lengths of travel and light weights of these movable lenses ().