The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2005
Filed:
Feb. 23, 2001
Gas leakage detection system, gas leakage detection method and semiconductor manufacturing apparatus
Kiyoshi Komiyama, Nirasaki, JP;
Shinichi Watanabe, Nirasaki, JP;
Kazunori Gotoda, Yokohama, JP;
Tokyo Electron Limited, Tokyo, JP;
Tomoe Shokai Co., Ltd., Tokyo, JP;
Abstract
Components of sampled gases are analyzed by a Fourier transform infrared spectrophotometer. It is determined whether or not the analyzed gases include at least one kind of specific gases equal to or more than a predetermined quantity. In a case where mixed gases include at least one kind of the specific gases equal to or more than the predetermined quantity, a controllersupplies an operation display monitorwith a signal indicating leakage of the kind of the specific gases. Hence, it is possible to realize detection by kind of the gases with high accuracy irrespective of the kind of leaked gas.