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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6900284 B1

PDFFull Text
Expired
Date of Patent:
May. 31, 2005

Filed:

Sep. 30, 2002

Poly-o-hydroxyamides, polybenzoxazoles, processes for producing poly-o-hydroxyamides, processes for producing polybenzoxazoles, dielectrics including a polybenzoxazole, electronic components including the dielectrics, and processes for manufacturing the electronic components

Applicants:

Klaus Lowack, Erlangen, DE;

Anna Maltenberger, Leutenbach, DE;

Recai Sezi, Röttenbach, DE;

Andreas Walter, Egloffstein, DE;

Inventors:

Klaus Lowack, Erlangen, DE;

Anna Maltenberger, Leutenbach, DE;

Recai Sezi, Röttenbach, DE;

Andreas Walter, Egloffstein, DE;

Assignee:

Infineon Technologies AG, Munich, DE;

Attorneys:

Laurence A. Greenberg

Werner H. Stemer

Gregory L. Mayback

Primary Examiner:

P Hampton Hightower

Int. Cl.
CPC ...
C08G073/22 ; C08G069/00 ;
U.S. Cl.
CPC ...
Abstract

Poly-o-hydroxyamides are cyclicized to obtain polybenzoxazoles. The poly-o-hydroxyamides provide effective filling of trenches. In particular, the poly-o-hydroxyamides can fill trenches having a width of less than 100 nm and an aspect ratio of more than 4. Further, the polybenzoxazoles of the invention are very suitable for the damascene process. A dielectric can be made from the polybenzoxazole. In turn, semiconductor devices can include the dieletric. Processes for making the poly-o-hydroxyamides, polybenzoxazoles, and semiconductor devices are included.

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Lowack, Klaus. (2005). Poly-o-hydroxyamides, polybenzoxazoles, processes for producing poly-o-hydroxyamides, processes for producing polybenzoxazoles, dielectrics including a polybenzoxazole, electronic components including the dielectrics, and processes for manufacturing the electronic components (U.S. Patent No. 6900284). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6900284

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