The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2005
Filed:
Dec. 31, 2002
Applicant:
James E. Klekotka, Mesa, AZ (US);
Inventor:
James E. Klekotka, Mesa, AZ (US);
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G06F019/00 ;
U.S. Cl.
CPC ...
Abstract
The present invention presents an apparatus and method for monitoring a material processing system, wherein the material processing system includes a processing tool, a number of RF-responsive process sensors coupled to the processing tool to generate and transmit process data, and a sensor interface assembly (SIA) configured to receive the process data from the plurality of RF-responsive process sensors.