The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2005
Filed:
Aug. 22, 2002
Thomas Grebner, Freising, DE;
Hans-christoph Ostendorf, Munich, DE;
Michael Schittenhelm, Poing, DE;
Erwin Thalmann, Munich, DE;
Thomas Grebner, Freising, DE;
Hans-Christoph Ostendorf, Munich, DE;
Michael Schittenhelm, Poing, DE;
Erwin Thalmann, Munich, DE;
Infineon Technologies AG, München, DE;
Abstract
The invention provides a method for testing wafers () to be tested in a test device (), in which the test device () can be calibrated, at least one calibration wafer () being automatically introduced into the test device () by means of a handling unit (), calibration values of the test device () being determined by means of a control by a calibration sequence control unit (), the calibration values determined being stored in a memory unit (), the test device () being calibrated by means of the stored calibration values, the calibration wafer () being output from the calibrated test device (), and at least one wafer () to be tested being introduced into the calibrated test device () by means of the handling unit () and being tested by a control by means of a test sequence control unit () in the calibrated test device (), the stored calibration values being applied.