The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2005
Filed:
Nov. 01, 2001
Alan C. Janos, Darnestown, MD (US);
David Ferris, Rockville, MD (US);
Ivan Berry, Ellicott City, MD (US);
Michael G. Ury, Great Barrington, MA (US);
Alan C. Janos, Darnestown, MD (US);
David Ferris, Rockville, MD (US);
Ivan Berry, Ellicott City, MD (US);
Michael G. Ury, Great Barrington, MA (US);
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
An apparatus and process for enhancing the ignition of a gas to form a plasma in a plasma tool. The apparatus and process includes the use of a plasma tube to locally enhance the applied electric field so that plasma can be initiated at higher pressures, at lower electric fields, and/or in otherwise difficult gases to ignite. The plasma tube includes at least one conductive fiber secured to the tube. A process for enhancing the local electric field includes coupling the plasma tube to an energy source such as microwave energy, radiofrequency energy, or a combination comprising at least one of the foregoing energy sources.