The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2005
Filed:
Jul. 08, 2002
Samuel J. Cole, Portland, OR (US);
Ric Dehoff, Hillsboro, OR (US);
Edward D. Seeberger Jr., Portland, OR (US);
Samuel J. Cole, Portland, OR (US);
Ric DeHoff, Hillsboro, OR (US);
Edward D. Seeberger Jr., Portland, OR (US);
CyberOptics Semiconductor, Inc., Beaverton, OR (US);
Abstract
A wafer mapping sensor assembly includes a housing, and an imaging array positioned therein. Imaging optics are positioned relative to the array to focus an image upon the array. An illumination source is configured to direct illumination toward the wafer, where such illumination is reflected by the wafer. An optical element is interposed between the source and the wafer. The optical element directs the illumination to reduce the effects of undesirable illumination.