The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2005
Filed:
Aug. 31, 1999
Takeshi Uchida, Tsukuba, JP;
Jun Matsuzawa, Hitachi, JP;
Tetsuya Hoshino, Tsukuba, JP;
Yasuo Kamigata, Tsukuba, JP;
Hiroki Terazaki, Tsukuba, JP;
Yoshio Honma, Kokubunji, JP;
Seiichi Kondoh, Kokubunji, JP;
Takeshi Uchida, Tsukuba, JP;
Jun Matsuzawa, Hitachi, JP;
Tetsuya Hoshino, Tsukuba, JP;
Yasuo Kamigata, Tsukuba, JP;
Hiroki Terazaki, Tsukuba, JP;
Yoshio Honma, Kokubunji, JP;
Seiichi Kondoh, Kokubunji, JP;
Hitachi Chemical Company, LTD, Tokyo, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An abrasive liquid for a metal comprising (1) an oxidizing agent for a metal, (2) a dissolving agent for an oxidized metal, (3) a first protecting film-forming agent such as an amino acid or an azole which adsorbs physically on the surface of the metal and/or forms a chemical bond, to thereby form a protecting film, (4) a second protecting film-forming agent such as polyacrylic acid, polyamido acid or a salt thereof which assists the first protecting film-forming agent in forming a protecting film and (5) water; and a method for polishing.