The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2005
Filed:
Nov. 06, 2000
Kuan-chou Chen, Hsinchu, TW;
Ping-yu HU, Hsinchu Hsien, TW;
Kuei-jung Chen, Miao Li, TW;
Tzong-ming Wu, Taipei, TW;
Wu-lang Lin, Hsinchu Hsien, TW;
Wen-yo Lee, Taipei Hsien, TW;
Kuan-Chou Chen, Hsinchu, TW;
Ping-Yu Hu, Hsinchu Hsien, TW;
Kuei-Jung Chen, Miao Li, TW;
Tzong-Ming Wu, Taipei, TW;
Wu-Lang Lin, Hsinchu Hsien, TW;
Wen-Yo Lee, Taipei Hsien, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified pod) is put on the carrier and latched by a locking plate of the latch at an accurate position. The carrier moves forwardly to tightly engage the FOUP to a gate on an access at a backboard of the machine base, and thus a cover of the FOUP is opened by a headstock gear at the back of the gate then carried backwardly away from the FOUP by the horizontal shifting mechanism and lowered by the lifting mechanism. Reversely, the cover is closed on the FOUP. As such, the cover is loaded and opened automatically, as well as in closed, which can be a part of automation and prevents wafers from contamination.