The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2005
Filed:
Jul. 24, 2003
Hans-juergen Dobschal, Kleinromstedt, DE;
Thomas Scheruebl, Jena, DE;
Robert Brunner, Jena, DE;
Norbert Rosenkranz, Reichenbach, DE;
Joern Greif-wuestenbecker, Marburg, DE;
Hans-Juergen Dobschal, Kleinromstedt, DE;
Thomas Scheruebl, Jena, DE;
Robert Brunner, Jena, DE;
Norbert Rosenkranz, Reichenbach, DE;
Joern Greif-Wuestenbecker, Marburg, DE;
Carl Zeiss Microelectric Systems GmbH, Jena, DE;
Abstract
Imaging system for a microscope based on extreme ultraviolet (EUV) radiation. The present invention is directed to a reflective imaging system for an x-ray microscope for examining and object in an object plane, wherein the object is illuminated by rays of a wavelength of less than 100 nm, particularly less than 30 nm, and is imaged in a magnified manner in an image plane. In the imaging system, according to the invention, for a microscope based on extreme ultraviolet (EUV) radiation with wavelengths in the range of less than 100 nm, with a magnification of 0.1× to 1000× and a structural length of less than 5 m, at least one of the imaging optical elementsandin the beam path has a diffractive-reflective structure which is arranged on a spherical or plane area and has a non-rotationally symmetric, asymmetric shape. The arrangement according to the invention provides an imaging system which avoids the disadvantages of the prior art and ensures a high imaging quality. The manufacturing cost remains reasonable due to the exclusive use of spherical mirrors.