The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2005
Filed:
Jan. 31, 2003
Kyoji Yamashita, Kyoto, JP;
Hiroyuki Umimoto, Hyogo, JP;
Mutsumi Kobayashi, Kyoto, JP;
Katsuhiro Ohtani, Nara, JP;
Tatsuya Kunikiyo, Tokyo, JP;
Katsumi Eikyu, Tokyo, JP;
Kyoji Yamashita, Kyoto, JP;
Hiroyuki Umimoto, Hyogo, JP;
Mutsumi Kobayashi, Kyoto, JP;
Katsuhiro Ohtani, Nara, JP;
Tatsuya Kunikiyo, Tokyo, JP;
Katsumi Eikyu, Tokyo, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Renesas Technology Corporation, Tokyo, JP;
Abstract
A CBCM measurement device includes a PMIS transistor, an NMIS transistor, a first reference conductor section connected to a first node, a second reference conductor section, with a dummy capacitor being formed between the first and second reference conductor sections, a first test conductor section connected to a second node, and a second test conductor section, with a test capacitor being formed between the first and second test conductor sections. The transistors are turned ON/OFF by using control voltages Vand V, and the capacitance of a target capacitor in the test capacitor is measured based on currents flowing through the first and second nodes. The capacitance measurement precision is improved by, for example, increasing a dummy capacitance.