The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2005
Filed:
Jul. 08, 2003
Hirotami Koike, Tokyo, JP;
Kouji Kimura, Tokyo, JP;
Hirotami Koike, Tokyo, JP;
Kouji Kimura, Tokyo, JP;
Kabushiki Kaisha Topcon, Tokyo, JP;
Abstract
A scanning electron microscope in the present invention includes an electron sourceto radiate an electron beam, an objective lens systemto focus the radiated electron beam on a sample, scanning systemsto scan the focused electron beam on the sample, secondary electron detection systemsto detect secondary electrons emitted from the sample, and a secondary electron image displaying systemto display a secondary electron image of the samplewith a secondary electron detection signal from the secondary electron detection system. The objective lensis composed of first and second objective lenses. The first objective lensis mainly excited when using in a wide visual field mode and the second objective lensis mainly excited when using in a high resolution mode.