The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2005
Filed:
Oct. 23, 2001
Lawrence E. Felton, Hopkinton, MA (US);
Peter W. Farrell, Lunenburg, MA (US);
Jing Luo, Lexington, MA (US);
David J. Collins, Windham, NH (US);
John R. Martin, Foxborough, MA (US);
William A. Webster, Tewksbury, MA (US);
Lawrence E. Felton, Hopkinton, MA (US);
Peter W. Farrell, Lunenburg, MA (US);
Jing Luo, Lexington, MA (US);
David J. Collins, Windham, NH (US);
John R. Martin, Foxborough, MA (US);
William A. Webster, Tewksbury, MA (US);
Other;
Abstract
A MEMS capping method and apparatus uses a cap structure on which is formed a MEMS cavity, a cut capture cavity, and a cap wall. The cap wall is essentially the outer wall of the MEMS cavity and the inner wall of the cut capture cavity. The cap structure is bonded onto a MEMS structure such that the MEMS cavity covers protected MEMS components. The cap structure is trimmed by cutting through to the cut capture cavity from the top of the cap structure without cutting all the way through to the MEMS structure.