The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2005
Filed:
Jun. 10, 2003
Applicants:
Petrus Carolus Maria Frissen, Beek, NL;
Johan Cornelis Compter, Eindhoven, NL;
Rob Tabor, Helmond, NL;
Inventors:
Petrus Carolus Maria Frissen, Beek, NL;
Johan Cornelis Compter, Eindhoven, NL;
Rob Tabor, Helmond, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B027/58 ; G03B027/62 ;
U.S. Cl.
CPC ...
Abstract
A coil for use in an actuator in a lithographic projection apparatus. The coil is formed of a strip of electrically conducting sheet-material that is wound round a winding axis. Respective turns of the strip of sheet-material are separated by an electrically non-conducting layer.