The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2005
Filed:
Sep. 24, 2002
Michinori Nishikawa, Mie, JP;
Manabu Sekiguchi, Ibaraki, JP;
Matthias Patz, Heverlee, BE;
Mutsuhiko Yoshioka, Ibaraki, JP;
Atsushi Shiota, Ibaraki, JP;
Kinji Yamada, Ibaraki, JP;
Michinori Nishikawa, Mie, JP;
Manabu Sekiguchi, Ibaraki, JP;
Matthias Patz, Heverlee, BE;
Mutsuhiko Yoshioka, Ibaraki, JP;
Atsushi Shiota, Ibaraki, JP;
Kinji Yamada, Ibaraki, JP;
JSR Corporation, Tokyo, JP;
Abstract
An insulating film for semiconductors which has excellent adhesion to films formed by CVD and is useful as a dielectric film in semiconductor devices and the like is provided. The insulating film is obtained by a method comprising: (A) a step of subjecting a substrate to at least either of (A-1) at least one treatment selected from the group consisting of an ultraviolet irradiation treatment, an oxygen plasma treatment, a nitrogen plasma treatment, a helium plasma treatment, an argon plasma treatment, a hydrogen plasma treatment and an ammonia plasma treatment, and (A-2) a treatment with at least one of alkoxysilane compound having a reactive group and a product of the hydrolysis and condensation thereof; and (B) a step of applying a composition for film formation which comprises an organic solvent and either or both of at least one compound selected from the group consisting of compounds represented by the general formulae (1) to (4) as described hereinabove, and a hydrolysis/condensation product obtained by hydrolyzing and condensing the at least one compound, to the substrate and heating the resulting coating.