The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2005
Filed:
Oct. 19, 2001
Applicants:
Yukio Morishige, Tokyo, JP;
Makoto Oomiya, Tokyo, JP;
Inventors:
Yukio Morishige, Tokyo, JP;
Makoto Oomiya, Tokyo, JP;
Assignee:
Laserfront Technologies, Inc., Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C016/00 ; H05H001/00 ; C23F001/00 ;
U.S. Cl.
CPC ...
Abstract
In order to correct a white defect on a surface of a substrate, the substrate is held with the surface facing downward, laser light is upward irradiated at the defect on the surface in material gas, and as a result, the white defect is covered with film.