The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2005
Filed:
Apr. 25, 2003
Applicants:
Johan Siegers, Amersfoort, NL;
Kornelius Haanstra, Nijeveen, NL;
Jan Zinger, Dwingelo, NL;
Inventors:
Assignee:
ASM International N.V., Bilthoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F019/00 ;
U.S. Cl.
CPC ...
Abstract
A system and method is used for measuring the performance of semiconductor processing tools. A software component may be used to define a set of performance variables and associate performance limits. From the set of performance variables, a set of variables may be selected to create a customized test for a particular tool. The system may be used to store the results of the tests within the system for fast comparison with the associated performance limits, with previous test results, or both. The system may be used to display an overall status of groups of performance variables.