The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2005
Filed:
Jan. 07, 2003
Osamu Tanaka, Tosu, JP;
Kenji Todoroki, Tosu, JP;
Osamu Tanaka, Tosu, JP;
Kenji Todoroki, Tosu, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
The present invention is to provide a processing system and a processing method which do not require the selection of processing recipes by operators and can provide high throughputs. The processing system for processing an object group of one object-to-be-processed, or two or more objects-to-be-processed in a processing vessel with a processing liquid, comprises a plurality of processing vessel groups M, M, Meach of at least one or more processing vessels, which can perform the same processing; transportation apparatusfor transporting object groups WS to the plurality of processing vessel groups; and a control unitfor selecting the processing vessel groups M, M, Mfor the object groups WS to be transported to, the control unithaving an applying function of applying processing recipes for the respective object groups and a selecting function of selecting the processing vessel groups for executing the respective applied processing recipes in a prescribed sequence.