The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2005
Filed:
Jun. 14, 2000
Atsushi Yamada, Tokyo, JP;
Tsutomu Negishi, Tokyo, JP;
Toshiharu Kobayashi, Tokyo, JP;
Norio Watanabe, Tokyo, JP;
Atsushi Yamada, Tokyo, JP;
Tsutomu Negishi, Tokyo, JP;
Toshiharu Kobayashi, Tokyo, JP;
Norio Watanabe, Tokyo, JP;
JEOL Ltd., Tokyo, JP;
Abstract
There is disclosed a scanning electron charged-particle beam instrument facilitating a search for a desired field of view on a specimen. Also, a method of observing a specimen image with this instrument is disclosed. In field of view search mode, low-magnification images are gained from plural regions on the specimen. The image signals gained from the regions are sent to corresponding image memories and stored there. At the same time, the X and Y coordinates of the specimen at the low magnification are stored. If the image is rotated, the angular position and the direction are simultaneously stored. The image signals stored in the image memories are supplied to a CRT, and plural specimen images are displayed on the CRT. If a human operator selects a desired one out of the displayed images, a control unit controls a stage control unit according to coordinates read out, driving an X-Y translation stage. The stage is moved to bring a specimen position corresponding to the selected image onto the optical axis of the electron beam.