The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2005
Filed:
Sep. 10, 2002
David T. OR, San Jose, CA (US);
Keith K. Koai, Los Gatos, CA (US);
Hiroyuki Takahama, Sawara, JP;
Takahiro Ito, Urayasu, JP;
Koji Ota, Chiba, JP;
Hiroshi Sato, Chiba, JP;
David T. Or, San Jose, CA (US);
Keith K. Koai, Los Gatos, CA (US);
Hiroyuki Takahama, Sawara, JP;
Takahiro Ito, Urayasu, JP;
Koji Ota, Chiba, JP;
Hiroshi Sato, Chiba, JP;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A substrate support is provided that features a lift pin having at least one larger diameter shoulder section that forms a relief region between the lift pin and a guide hole disposed through a substrate support. The shoulder section minimizes contact between the substrate support and lift pin guide hole, thereby reducing pin scratching, particle generation, component wear, and increasing the useful life of the pin. In another embodiment, a flat-bottom tip is provided to promote self-standing of the lift pin, reducing pin tilting or leaning of the lift pin within the guide hole.