The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2005
Filed:
Jul. 10, 2003
Applicants:
Takashi Toyoda, Tokyo, JP;
Masatoshi Kimura, Tokyo, JP;
Inventors:
Takashi Toyoda, Tokyo, JP;
Masatoshi Kimura, Tokyo, JP;
Assignee:
Renesas Technology Corp., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L021/00 ;
U.S. Cl.
CPC ...
Abstract
A CMOS image sensor is made such that an oxide film, a nitride film, an oxide film, and a nitride film constituting an antireflection film are stacked over the surface of a photodiode, and the oxide film and the nitride film are anisotropically etched, to thereby form sidewalls at both sides of a gate electrode constituting an N type MOS transistor.