The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2005
Filed:
Mar. 22, 2002
Osamu Suenaga, Nirasaki, JP;
Kazuo Yamamoto, Nirasaki, JP;
Kaoru Fujihara, Nirasaki, JP;
Sadao Kobayashi, Tokyo, JP;
Osamu Suenaga, Nirasaki, JP;
Kazuo Yamamoto, Nirasaki, JP;
Kaoru Fujihara, Nirasaki, JP;
Sadao Kobayashi, Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
TAISEI Corporation, Tokyo, JP;
Abstract
A semiconductor manufacturing facility has a proper strength and an anti-vibration effect. The semiconductor facility contains processing apparatuses, installation tables and an installation floor. An apparatus having a vibration source is installed on an installation table having a rigid structure. The installation table is installed on the installation floor having a floor construction including a plurality of columns, which support a floor member extending in horizontal directions. An interval of the columns is 4 m to 12 m.