The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2005
Filed:
Aug. 29, 2003
Yukito Aota, Kanagawa, JP;
Masahiro Kanai, Kanagawa, JP;
Atsushi Koike, Kanagawa, JP;
Tomokazu Sushihara, Chiba, JP;
Yukito Aota, Kanagawa, JP;
Masahiro Kanai, Kanagawa, JP;
Atsushi Koike, Kanagawa, JP;
Tomokazu Sushihara, Chiba, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A plate high-frequency electrode for supplying a high-frequency power of the VHF band and a grounding electrode are disposed in opposition to each other at an interval of less than 8 mm in a vacuum vessel; at least a silane-based gas and nitrogen gas as source gases are introduced into a reaction space of the vacuum vessel, and a silicon nitride deposited film is formed with the pressure of the reaction space being kept at 40 to 133. Thereby, a silicon nitride film with good quality can be obtained.