The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2005
Filed:
Apr. 29, 2003
Applicants:
Christophe Malville, La Terrasse, FR;
Frédéric Metral, Saint-Quentin sur Isere, FR;
Inventors:
Christophe Malville, La Terrasse, FR;
Frédéric Metral, Saint-Quentin sur Isere, FR;
Assignee:
S.O.I. Tec Silicon on Insulator Technologies S.A., Bernin, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R031/20 ; H01L021/00 ;
U.S. Cl.
CPC ...
Abstract
The invention relates to a device and method for automatically determining the surface quality of a bonding interface between two wafers. The device includes a detector for automatically detecting a bonding wave at a predetermined measuring site to determine when bonding occurs at the measuring site, and a processing unit for automatically calculating the bonding speed based on a location of the measuring site and at least one other predetermined site.