The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2005
Filed:
Dec. 21, 2000
Setsuji Shinoda, Kanagawa, JP;
Toshiharu Nakazawa, Kanagawa, JP;
Nobuharu Noji, Kanagawa, JP;
Shunichi Aiyoshizawa, Tokyo, JP;
Setsuji Shinoda, Kanagawa, JP;
Toshiharu Nakazawa, Kanagawa, JP;
Nobuharu Noji, Kanagawa, JP;
Shunichi Aiyoshizawa, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
The present apparatus includes a casing () having a gas introduction opening () for introducing a gas into the casing and a gas discharge opening () for discharging the gas from the casing, a gas circulating tube passage () communicating with the casing for effecting circulation of the gas, a circulating fan () for effecting circulation of the gas in the casing through the gas circulating tube passage, and a valve () switchable between a position for conducting the introducing and discharging of the gas into and from the casing through the gas introduction opening and the gas discharge opening and a position for effecting circulation of the gas in the casing through the gas circulating tube passage. The apparatus further includes a trap (), a filter () and a heat exchanger () for conducting a desired treatment with respect to the circulated gas, such as removal of particles.