The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2005
Filed:
Dec. 04, 2002
Kaori Watanabe, Kanagawa, JP;
Hidemitsu Aoki, Kanagawa, JP;
Norio Ishikawa, Tokyo, JP;
Kiyoto Mori, Tokyo, JP;
Kaori Watanabe, Kanagawa, JP;
Hidemitsu Aoki, Kanagawa, JP;
Norio Ishikawa, Tokyo, JP;
Kiyoto Mori, Tokyo, JP;
NEC Electronics Corporation, Kanagawa, JP;
Kanto Kagaku Kabushiki Kaisha, Tokyo, JP;
Abstract
A chemical solution treatment apparatus for dissolving and removing ruthenium-based metal adhering to a substrate by a chemical solution, includes: a chemical solution treatment unit; a reservoir unit; and a chemical solution circulation system. The chemical solution inside treatment unit comprises a chemical solution supplying nozzle, and a recovering mechanism. The reservior unit has a structure having a clearence part to be in contact with the chemical solution so that gas components derived from the ruthenium-based metal dissolved and removed in said chemical solution treatment are volatilized outside the chemical solution during circulation of the chemical solution, and comprises an exhaust duct.