The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2005
Filed:
Aug. 27, 2001
Applicant:
Andrew Eric Carlson, Middletown, CT (US);
Inventor:
Andrew Eric Carlson, Middletown, CT (US);
Assignee:
Zygo Corporation, Middlefield, CT (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B009/02 ;
U.S. Cl.
CPC ...
Abstract
A multi-axis interferometer includes a multiplexer portion and a beam splitter portion integrated into the same optically transmissive monolith. The multiplexer portion is configured to split an input beam into a corresponding plurality of intermediate beams, each of which is directed toward the beam splitter portion through a corresponding output port of the multiplexer portion. The beam splitter portion is configured to separate the intermediate beam into a measurement component and a reference component.