The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 05, 2005
Filed:
Feb. 13, 2002
Jean R. Vatus, San Jose, CA (US);
David K. Carlson, Santa Clara, CA (US);
Arkadii V. Samoilov, Sunnyvale, CA (US);
Lance A. Scudder, Santa Clara, CA (US);
Paul B. Comita, Menlo Park, CA (US);
Annie A. Karpati, Cupertino, CA (US);
Jean R. Vatus, San Jose, CA (US);
David K. Carlson, Santa Clara, CA (US);
Arkadii V. Samoilov, Sunnyvale, CA (US);
Lance A. Scudder, Santa Clara, CA (US);
Paul B. Comita, Menlo Park, CA (US);
Annie A. Karpati, Cupertino, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method is provided wherein a temperature reading error of a pyrometer is avoided. An upper pyrometer is used to detect infrared radiation from a test layer formed on a test substrate under standard processing conditions. The infrared radiation from the test layer has a period having a length which is indicative of growth rate of the layer. The period is generally inversely proportional to the growth rate. The growth rate is directly related to the temperature.