The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 05, 2005

Filed:

Dec. 17, 2002
Applicants:

Toshihiko Iijima, Nirasaki, JP;

Shuji Akiyama, Nirasaki, JP;

Tadahiro Obayashi, Kikuchi-gun, JP;

Inventors:

Toshihiko Iijima, Nirasaki, JP;

Shuji Akiyama, Nirasaki, JP;

Tadahiro Obayashi, Kikuchi-gun, JP;

Assignees:

Tokyo Electron Limited, Tokyo, JP;

Miraial Co., Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65D085/90 ;
U.S. Cl.
CPC ...
Abstract

A wafer cassette comprises a case body and an adapter that supports substrates. There are adapters of various types corresponding to the size of the substrates to be supported. The case body and the adapter of any type are united in a manner such that fitting portions of the case body are fitted individually in fitting holes of the adapter.


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