The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2005
Filed:
Jan. 31, 2001
Masaichi Murakami, Machida, JP;
Masaki Kato, Yokohama, JP;
Katsuya Machino, Yotsukaido, JP;
Manabu Toguchi, Kawasaki, JP;
Masaichi Murakami, Machida, JP;
Masaki Kato, Yokohama, JP;
Katsuya Machino, Yotsukaido, JP;
Manabu Toguchi, Kawasaki, JP;
Nikon Corporation, Tokyo, JP;
Abstract
It is an object of the present invention to smoothly join divided patterns adjacent to each other in a synchronous moving direction when a mask and a substrate are moved in synchronization, and the divided patterns are joined and picture-synthesized on the substrate. According to the invention, when the mask and the substrate are moved in synchronization with respect to irradiation with an exposing light, the divided patterns of the mask are projected on the substrate, and a plurality of divided patterns adjacent on the substrate are joined and exposed, the divided patterns adjacent to each other in the synchronous moving direction partially overlap each other.