The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 29, 2005
Filed:
Mar. 29, 2001
Yasuhiro Shimada, Kanagawa, JP;
Takayuki Yagi, Kanagawa, JP;
Haruhito Ono, Kanagawa, JP;
Hiroshi Maehara, Kanagawa, JP;
Yasuhiro Shimada, Kanagawa, JP;
Takayuki Yagi, Kanagawa, JP;
Haruhito Ono, Kanagawa, JP;
Hiroshi Maehara, Kanagawa, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
This invention relates to an electron optical system array having a plurality of electron lenses. The electron optical system array includes a plurality of electrode structures which are arranged along the paths of a plurality of charged-particle beams and have pluralities of apertures on the paths of the plurality of charged-particle beams. At least one of the plurality of electrode structures includes a substrate having a plurality of apertures for transmitting the plurality of charged-particle beams, and a plurality of electrodes extending from the side surfaces of the plurality of apertures to the peripheries of the plurality of apertures. At least the surface of the substrate is insulated.